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- > Fundamentals of Single Crystal and Thin Film Processing
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School of Engineering
- Undergraduate major in Mechanical Engineering
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- Common courses
- School of Materials and Chemical Technology
- School of Computing
- School of Life Science and Technology
- School of Environment and Society
- 工学院，物質理工学院，環境・社会理工学院共通科目
- Liberal arts and basic science courses
- First-Year Courses
- School of Science
- School of Engineering
- School of Materials and Chemical Technology
- School of Computing
- School of Life Science and Technology
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School of Environment and Society
- Department of Architecture and Building Engineering
- Department of Civil and Environmental Engineering
- Department of Transdisciplinary Science and Engineering
- Department of Social and Human Sciences
- Department of Innovation Science
- Graduate major in Technology and Innovation Management
- Common courses
- Liberal arts and basic science courses
- Academic unit or major
- Undergraduate major in Materials Science and Engineering
- Instructor(s)
- Shinozaki Kazuo John Baniecki John David Baniecki
- Class Format
- Lecture
- Media-enhanced courses
- Day/Period(Room No.)
- Mon7-8(S7-202) Thr7-8(S7-202)
- Group
- -
- Course number
- MAT.C315
- Credits
- 2
- Academic year
- 2017
- Offered quarter
- 3Q
- Syllabus updated
- 2017/3/17
- Lecture notes updated
- 2017/11/13
- Language used
- Japanese
- Access Index
-
Lecture
Lecture 1 Introduction to single crystal growth: single crystals and applications, Single crystal growth method 1
2017.9.25(Mon.) 7-8Session
講義日程_修正版(63KB)
Lecture
Lecture 2 Course Introduction. Vacuum science and technology: kinetic theory of gases and transport.
2017.9.28(Thu.) 7-8Session
Lecture
Lecture 3 PVD processes (I): Vacuum pumps and systems, physics and chemistry of evaporation, evaporation hardware and techniques.
2017.10.2(Mon.) 7-8Session
Lecture
Lecture 4 PVD processes (II): Glow discharges and plasmas, sputtering processes, sputtering hardware and techniques.
2017.10.5(Thu.) 7-8Session
Lecture
Lecture 5 CVD processes (I): Reaction types, thermodynamics of CVD, gas transport, growth kinetics.
2017.10.12(Thu.) 7-8Session
Lecture
Lecture 6 CVD processes (II): CVD processes and systems. Film formation and structure (I): Capillarity theory, atomistic nucleation processes (I).
2017.10.16(Mon.) 7-8Session
Lecture
Lecture 7 Film formation and structure (II): Atomistic nucleation processes (II), cluster coalescence and depletion, grain structure of films.
2017.10.19(Thu.) 7-8Session
Lecture
Lecture 8 Structural characterization of films (SEM, TEM, XRD). Chemical characterization of films (I): Physical principles of XPS, AES.
2017.10.23(Mon.) 7-8Session
Lecture
Lecture 9
2017.10.26(Thu.) 7-8Session
Lecture
Lecture 10 Chemical characterization of films (II): Rutherford backscattering spectroscopy (RBS), Secondary Ion Mass spectroscopy (SIMS) .
2017.10.30(Mon.) 7-8Session
Lecture
Lecture 11 Oral presentation.
2017.11.2(Thu.) 7-8Session
Lecture
Lecture 12 Introduction to single crystal growth: Single crystal growth method 2
2017.11.6(Mon.) 7-8Session
Lecture
Lecture 13 Crystal growth theory I: Single crystal, driving force of crystal growth, nucleation
2017.11.9(Thu.) 7-8Session
Lecture
Lecture 14 Crystal growth theory II: growth rate of single crystal
2017.11.13(Mon.) 7-8Session
Lecture
Lecture 15 Crystal growth theory III: mechanism of crystal growth, equilibrium form, growth form
2017.11.16(Thu.) 7-8Session
Lecture
Lecture 16 Crystal growth and phase diagram: kinds of phase diagram and growth methods
2017.11.20(Mon.) 7-8Session
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