This course provides fundamental aspects of physical chemistry for electronic materials and device processes. Firstly, students will be introduced to thermodynamic functions of enthalpy, entropy, and free energy from the chemical reactions point of view. And then, they will learn about the macroscopic view of chemical reactions, using these thermodynamic functions. In particular, they will gain an understanding of the direction of change in reactions and its attainable chemical equilibrium. Secondly, students will learn statistical dynamics that can describe thermodynamic functions from the microscopic picture to deeply understand the nature of chemical reactions and to acquire the calculation method of the thermodynamic functions. Thirdly, they will learn about phenomenological reaction kinetics and transition state theory that describe the rate of chemical reactions to develop an understanding of the whole picture of chemical reactions. Finally, this course will deal with surface reactions for electronic material/device processes as a case study of the energetic and kinetic analyses of chemical reactions.
Through the course, the students will be able to
1) understand chemical reaction equilibrium analysis using the thermodynamic functions
2) calculate the thermodynamic functions from microscopic properties of substances using statistical dynamics.
3) acquire the method phenomenologically describing kinetics of chemical reactions, and calculate theoretically the absolute rate of chemical reactions.
4) understand surface reactions for electronic material/device processes.
Chemical thermodynamics, statistical thermodynamics, kinetic theory, transition state theory, surface reaction
|✔ Specialist skills||Intercultural skills||Communication skills||Critical thinking skills||Practical and/or problem-solving skills|
Exercises will be carried out during the class to help students understand lectures
|Course schedule||Required learning|
|Class 1||Thermochemical equation and enthalpy||Internal energy and enthalpy, and their change in chemical reactions|
|Class 2||Entropy and chemical reaction||Entropy and its change in chemical reactions|
|Class 3||Chemical reaction and free energy||Free energy, direction of change in chemical reactions, chemical equilibrium|
|Class 4||Partition functions and thermodynamic functions||Expression of the thermodynamic functions using partition functions|
|Class 5||Calculation of partition functions||Calculation method of partition functions|
|Class 6||Chemical potential and chemical equilibrium||Chemical potential and chemical equilibrium analysis|
|Class 7||Phenomenological and absolute reaction kinetics theories||Phenomenological kinetic theory and transition state theory|
|Class 8||Surface reaction||Surface reaction of electronic material/device processes|
Evaluation will be based on the term-end examination.
None in particular