This is a course to learn fundamentals of MEMS/NEMS to realize a tiny, high-precision, high-performance machine system by utilizing various micro/nano machining technologies based on the photolithography cultivated in the semiconductor integrated circuit manufacturing. Based on MEMS / NEMS design methods to take into account the size effects and scaling laws, photolithography, deposition, etching, and precision mechanical machining will be lectured. This course also describes micro actuators, micro sensors, micro fluidic devices, nano devices, and bio-MEMS to utilize these micro/nano machining technologies.
Students will acquire the following knowledge by taking this course.
1) Learn everything from basic to advanced technology of mechanisms, design techniques, film formation, and microfabrication for creating micro and nano-systems.
2) Get a picture of trends in advanced research of this field, related to microactuators, microsensors, microfluid devices, and bio MEMS that apply that technology.
MEMS/NEMS devices, thin film technology, lithography, etching, microfabrication, microactuators, microsensors, micro and nano-fluidics, bio MEMS
|✔ Applicable||How instructors' work experience benefits the course|
|One of the lecturer has 12 years of experience working with the National Research Laboratory of Metrology of the MITI for developing national standards of nanometer length, precision measurement and calibration technology, with practical experience in precise fabrication and MEMS/NEMS etchnology. The practices and research contents will be reflected in the lecture.|
MEMS, NEMS, Micromachine, Nanomachine, Photolithography, Deposition, Wet&Dry etching, Actuator, Sensor
|✔ Specialist skills||Intercultural skills||Communication skills||Critical thinking skills||Practical and/or problem-solving skills|
Students learn a different topic each week.
|Course schedule||Required learning|
|Class 1||Introduction||To understand the overview and the aim of the lecture.|
|Class 2||Fundamentals of MEMS/NEMS||To learn fundamentals of MEMS/NEMS.|
|Class 3||Photolithography||To gain an understanding of various types of photoresists and the exposure process.|
|Class 4||Dry etching||To learn what is dry etching process.|
|Class 5||Wet etching||To learn what is wet etching process.|
|Class 6||Precision mechanical machining||To investigate precision mechanical machining technologies.|
|Class 7||Fundamentals of thin-film technology||To figure out fundamentals of thin-film technology.|
|Class 8||Physical vapor deposition and chemical vapor deposition||To learn vapor deposition technologies.|
|Class 9||Micro actuator||To grasp the trend in micro actuators.|
|Class 10||Micro sensor||To understand the trend in micro sensors.|
|Class 11||Micro fluidic device||To grasp trend in micro fluidic devices.|
|Class 12||Nano fluidic device||To understand the trend in ｎano fluidic devices.|
|Class 13||Bio-MEMS||To understand the trend in bio-MEMS.|
|Class 14||Bio-nano device||To understand the trend in bio-nano devices.|
To enhance effective learning, students are encouraged to spend approximately 100 minutes preparing for class and another 100 minutes reviewing class content afterwards (including assignments) for each class.
They should do so by referring to textbooks and other course material.
1)MEMS and Microsystems: Design and Manufacture, Tai-Ran Hsu, McGraw-Hill
2)Solid-State Physics, Fluidics, and Analytical Techniques in Micro- and Nanotechnology (Fundmentals of Microfabrication and Nanotechnology), Marc J. Madou,CRC Press
3)Manufacturing Techniques for Microfabrication and Nanotechnology (Fundamentals of Microfabrication and Nanotechnolgy), Marc J. Madou, CRC Press
4) From MEMS to Bio-MEMS and Bio-NEMS:Marc J. Madou, CRC PressMicrofabrication and Nanotechnology)
5) Nanosystems, K Drexler, Wiley. Int.
Homeworks and reports