2021 Micro and Nano Systems

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Academic unit or major
Graduate major in Mechanical Engineering
Kim Joon-Wan  Hatsuzawa Takeshi  Ohtake Naoto  Yoshida Kazuhiro  Yanagida Yasuko  Yamamoto Takatoki  Nisisako Takasi 
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Course description and aims

This is a course to learn fundamentals of MEMS/NEMS to realize a tiny, high-precision, high-performance machine system by utilizing various micro/nano machining technologies based on the photolithography cultivated in the semiconductor integrated circuit manufacturing. Based on MEMS / NEMS design methods to take into account the size effects and scaling laws, photolithography, deposition, etching, and precision mechanical machining will be lectured. This course also describes micro actuators, micro sensors, micro fluidic devices, nano devices, and bio-MEMS to utilize these micro/nano machining technologies.

Student learning outcomes

Students will acquire the following knowledge by taking this course.
1) Learn everything from basic to advanced technology of mechanisms, design techniques, film formation, and microfabrication for creating micro and nano-systems.
2) Get a picture of trends in advanced research of this field, related to microactuators, microsensors, microfluid devices, and bio MEMS that apply that technology.

MEMS/NEMS devices, thin film technology, lithography, etching, microfabrication, microactuators, microsensors, micro and nano-fluidics, bio MEMS

Course taught by instructors with work experience

Applicable How instructors' work experience benefits the course
One of the lecturer has 12 years of experience working with the National Research Laboratory of Metrology of the MITI for developing national standards of nanometer length, precision measurement and calibration technology, with practical experience in precise fabrication and MEMS/NEMS etchnology. The practices and research contents will be reflected in the lecture.


MEMS, NEMS, Micromachine, Nanomachine, Photolithography, Deposition, Wet&Dry etching, Actuator, Sensor

Competencies that will be developed

Specialist skills Intercultural skills Communication skills Critical thinking skills Practical and/or problem-solving skills

Class flow

Students learn a different topic each week.

Course schedule/Required learning

  Course schedule Required learning
Class 1 Introduction To understand the overview and the aim of the lecture.
Class 2 Fundamentals of MEMS/NEMS To learn fundamentals of MEMS/NEMS.
Class 3 Photolithography To gain an understanding of various types of photoresists and the exposure process.
Class 4 Dry etching To learn what is dry etching process.
Class 5 Wet etching To learn what is wet etching process.
Class 6 Precision mechanical machining To investigate precision mechanical machining technologies.
Class 7 Fundamentals of thin-film technology To figure out fundamentals of thin-film technology.
Class 8 Physical vapor deposition and chemical vapor deposition To learn vapor deposition technologies.
Class 9 Micro actuator To grasp the trend in micro actuators.
Class 10 Micro sensor To understand the trend in micro sensors.
Class 11 Micro fluidic device To grasp trend in micro fluidic devices.
Class 12 Nano fluidic device To understand the trend in nano fluidic devices.
Class 13 Bio-MEMS To understand the trend in bio-MEMS.
Class 14 Bio-nano device To understand the trend in bio-nano devices.

Out-of-Class Study Time (Preparation and Review)

To enhance effective learning, students are encouraged to spend approximately 100 minutes preparing for class and another 100 minutes reviewing class content afterwards (including assignments) for each class.
They should do so by referring to textbooks and other course material.



Reference books, course materials, etc.

1)MEMS and Microsystems: Design and Manufacture, Tai-Ran Hsu, McGraw-Hill
2)Solid-State Physics, Fluidics, and Analytical Techniques in Micro- and Nanotechnology (Fundmentals of Microfabrication and Nanotechnology), Marc J. Madou,CRC Press
3)Manufacturing Techniques for Microfabrication and Nanotechnology (Fundamentals of Microfabrication and Nanotechnolgy), Marc J. Madou, CRC Press
4) From MEMS to Bio-MEMS and Bio-NEMS:Marc J. Madou, CRC PressMicrofabrication and Nanotechnology)
5) Nanosystems, K Drexler, Wiley. Int.

Assessment criteria and methods

Homeworks and reports

Related courses

  • MEC.J331 : Fundamentals of Micro and Nano Machining

Prerequisites (i.e., required knowledge, skills, courses, etc.)


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