2019 Ultra-precision Measurement

Font size  SML

Register update notification mail Add to favorite lecture list
Academic unit or major
Graduate major in Mechanical Engineering
Yoshioka Hayato  Hatsuzawa Takeshi  Hara Seiichiro  Yoshida Takako 
Course component(s)
Day/Period(Room No.)
Course number
Academic year
Offered quarter
Syllabus updated
Lecture notes updated
Language used
Access Index

Course description and aims

This lecture focuses in understanding fundamentals, data processing, and practical method, like stylus method, scanning probe microscopes, LASER metrology, and motion accuracy in ultra precision form metrology.

Student learning outcomes

By the end of this course, students will be able to:
1) understand the principle and items of ultra precision metrology.
2) understand the practical method in ultra precision form metrology,
3) understand the basic technology of ultra precision metrology.
4) understand the bases to create ultra precision metrology.


Ultra precision form measurement, information processing, ultra precision stylus measurement technique, scanning probe measurement, LASER measurement

Competencies that will be developed

Intercultural skills Communication skills Specialist skills Critical thinking skills Practical and/or problem-solving skills
- - - -

Class flow

Lecture on specific topic each time

Course schedule/Required learning

  Course schedule Required learning
Class 1 Ultra Precise Measurement and Metrology Standards What's the precise and ultra precise measurements
Class 2 Ultra-precision stylus profilometer and scanning probe microscope Limitation in physical contact
Class 3 Information processing for ultra-precision measurement Measure and error
Class 4 Coordinate measuring system Analysis and algorithm in size and form evaluation
Class 5 Ultra precision laser measurement LASER optics
Class 6 Motion accuracy measurement What's the motion accuracy
Class 7 Measurement accuracy and statistical test - For biometric data - Measurement accuracy and statistical test



Reference books, course materials, etc.

1)J.M.Rueger;Electronic Distance Measurement, Springer-Verlag(1990) 
2)J.S.Bendat and A.G.Piersol;Analysis and Measurement Procedures, John Wiley & Sons,Inc.(1971)
3)J.Feder;Fractals,Plenum Press,N.Y.(1988)
4)M.J.Bx, D.Davies and W.H.Swann;Mathematical and Statistical Techniques,Imperial Chemical IndustriesLtd.

Assessment criteria and methods

Multiple report submission 100% (Attendance is required for scoring the report tasks)

Related courses

  • MEC.J432 : Mechanism and Control for Ultra-precision Motion

Prerequisites (i.e., required knowledge, skills, courses, etc.)

It is desirable that students have learned “measurement” in mechanical engineering previously.

Page Top