2020 Fundamentals of Micro and Nano Machining

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Academic unit or major
Undergraduate major in Mechanical Engineering
Kim Joon-Wan  Shinshi Tadahiko  Yamamoto Takatoki  Nisisako Takasi  Hatsuzawa Takeshi 
Class Format
Lecture    (ZOOM)
Media-enhanced courses
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Offered quarter
Syllabus updated
Lecture notes updated
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Course description and aims

This course covers applications and various microfabrication methods to design and fabricate MEMS/NEMS devices. Methods include, patterning based on photolithography, deposition, etching (wet & dry), nanofabrication technologies, next-generation fabrication technologies, and the physics behind them. Enrollment preference is given to any students.

Student learning outcomes

By the end of this course, students will be able to:
1) Acquire the baseline knowledge about the theory and methods of various microfabrication techniques based on photolithography, and the ability to apply for developing the MEMS/NEMS devices.
2) Design the basic level of MEMS/NEMS devices.


MEMS, NEMS, Micromachine, Nanomachine, Photolithography, Deposition, Wet&Dry etching, Nanofabrication, Next-generation fabrication technology

Competencies that will be developed

Specialist skills Intercultural skills Communication skills Critical thinking skills Practical and/or problem-solving skills

Class flow

Each theme every week.

Course schedule/Required learning

  Course schedule Required learning
Class 1 Overview of MEMS/NEMS Study what are MEMS?, and the applications.
Class 2 Patterning Understand the patterning method base on photolithography.
Class 3 DepositionStudy various deposition methods. Understand the various deposition methods.
Class 4 Wet etching Understand what the wet etching is.
Class 5 Dry etching Understand what the dry etching is.
Class 6 Nano-fabrication Study nanofabrication methods.
Class 7 Integration of various micro and nano fabrication processes Learn the technology that integrates various micro and nano fabrication processes.

Out-of-Class Study Time (Preparation and Review)

To enhance effective learning, students are encouraged to spend approximately 100 minutes preparing for class and another 100 minutes reviewing class content afterwards (including assignments) for each class.
They should do so by referring to textbooks and other course material.


Japanese printed material only

Reference books, course materials, etc.

Japanese book only.

Assessment criteria and methods

By final test(about 70%) and assignments (about 30%)

Related courses

  • MEC.G311 : Introduction to Manufacturing Engineering
  • MEC.G331 : Production System Engineering

Prerequisites (i.e., required knowledge, skills, courses, etc.)


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