It is important to understand the basic properties of semiconductors, so the instructor in this course will base the lecture on application techniques and manufacturing methods, in a manner that beginners can also understand. In the first half of the course, students will learn about thin-film manufacturing, photolithography, and etching as important steps for element manufacturing made use of semiconductor properties, and gain an understanding of utilizations of semiconductor properties. At the same time students will deepen their understanding of substances used for semiconductors. In the latter half, students will learn about the general electrical properties of silicon and compound semiconductors, including the newest technology, while also expanding their knowledge of the luminescent properties of wide bandgap semiconductors, etc. Students will also acquire knowledge related to analysis methods for semiconductor properties.
Students in this course will learn about the electrical properties, luminescent properties, and mechanical properties of semiconductors as well as examples of applications that make use of them, while also learning manufacturing methods for semiconductor elements from the ground up. Students will also systematically learn about all sorts of semiconductor properties in a way that even beginners in other fields will be able to understand the content in depth. Students will also get a grasp of usage methods and related fields, encouraging a solid foundational understanding.
By the end of this course, students will have the following abilities:
1) To explain the difference between p-type and n-type semiconductor materials.
2) To explain semiconductor processes (coating, photolithography, etching).
3) To explain overview and principles of semiconductor properties.
Semiconductor, coating, lithography, etching, electric property, optical property, mechanical property
|✔ Specialist skills||Intercultural skills||Communication skills||Critical thinking skills||✔ Practical and/or problem-solving skills|
At the beginning of each class, the previous lecture is reviewed (exercise problems). At the end of class, contents of the lecture is summarized. 'Required learning' is needed to be completed outside of the classroom for preparation and review purposes.
|Course schedule||Required learning|
|Class 1||Semiconductor materials||Properties of semiconductor materials|
|Class 2||Semiconductor process (Coating)||Methods to fabricate thin film on a substrate|
|Class 3||Semiconductor process (Photolithography)||Methods to fabricate a pattern of resist on a substrate|
|Class 4||Semiconductor process (Etching)||Methods to remove some part of material|
|Class 5||Semiconductor process (Other processes)||Oxidation, diffusion, ion implantation and so on|
|Class 6||Electric properties/Optical properties and applications of semiconductor materials||Properties of n-type and p-type of semiconductor material, Emission and absorption of semiconductor material|
|Class 7||Final examination||Examination|
To enhance effective learning, students are encouraged to spend approximately 100 minutes preparing for class and another 100 minutes reviewing class content afterwards (including assignments) for each class.
They should do so by referring to textbooks and other course material.
Semiconductor devices -Physics and Technology- S. M. Sze
Mainly, the final examination (90 %) will be used for evaluation. Attendance and exercises (10%) will also be taken into account.