2019 Advanced Course of Ceramic Thin Film Technology

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Academic unit or major
Graduate major in Materials Science and Engineering
Instructor(s)
Katase Takayoshi  Azuma Yasuo  Funakubo Hiroshi 
Course component(s)
Lecture
Day/Period(Room No.)
Tue1-2(S7-202, G511)  Fri1-2(S7-202, G511)  
Group
-
Course number
MAT.C403
Credits
2
Academic year
2019
Offered quarter
1Q
Syllabus updated
2019/3/18
Lecture notes updated
-
Language used
Japanese
Access Index

Course description and aims

Thin-film growth and micro-patterning process of functional ceramics are important technologies, which have realized high-performance electronic devices, such as smart phone and tablet terminal, and environment devices, such as power generation (storage) devices and LEDs. In this lecture, students study film-growth and device-fabrication technologies, as well as characterization methods of ceramic thin films. In the first half, the lecture focuses on basic of thin-film growth techniques, and in the last half, it focuses on micro-patterning technologies and characterization methods, in connection with actual devices.

Student learning outcomes

Students will acquire the following skills by taking this course.
1) Learn the basic science of thin-film growth.
2) Acquire skills of film formation.
3) Learn device fabrication process.
4) Learn characterization techniques for thin films.
5) Understand application of thin-film technologies in the engineering field.

Keywords

Ceramics thin film, thin-film growth, Physical vapor deposition, Chemical vapor deposition, Micro-patterning, Scanning probe microscope, Structure analysis, Chemical composition analysis, Surface analysis, Electronic state analysis, Electronic property, Optical property, Dielectric property, Thermoelectric property, Magnetic property, Superconducting property

Competencies that will be developed

Intercultural skills Communication skills Specialist skills Critical thinking skills Practical and/or problem-solving skills
- -

Class flow

Exercise problems will be given.

Course schedule/Required learning

  Course schedule Required learning
Class 1 Introduction of thin-film technology Students have to understand the importance of thin-film-growth technique, micro-patterning technology, and film-property characterization.
Class 2 Basic of thin-film growth Students have to explain the thin-film form and crystal growth modes.
Class 3 Epitaxial growth, Hetero-junction, Superlattice Students have to explain the epitaxial film growth, and fabrication method of hetero-junction and superlattice, on single crystalline substrate.
Class 4 Physical vapor deposition Students have to explain the vacuum deposition and molecular beam epitaxy method.
Class 5 Physical vapor deposition (II) Students have to explain the Sputtering and Laser ablation method.
Class 6 Chemical vapor deposition Students have to explain the Chemical vapor deposition method.
Class 7 Special thin-film growth techniques Students have to explain the solid-phase epitaxy, liquid-phase epitaxy, and solution process for thin-film growth.
Class 8 Thin-film micro-patterning technologies Students have to explain patterning process by lithography and micro-patterning technologies by etching process
Class 9 Structural analysis Students have to explain the crystal structure analysis of thin film by X-ray diffraction and electron microscope.
Class 10 Chemical composition and electronic state analysis Students have to explain the chemical analysis and electronic state characterization of thin film.
Class 11 Surface analysis Students have to explain the surface analysis of thin film by scanning probe microscope.
Class 12 Electronic properties of thin film and characterization methods Students have to explain the characterization methods of electronic properties of thin film.
Class 13 Optical-dielectric properties of thin film and characterization methods Students have to explain the characterization methods of optical-dielectric properties of thin film.
Class 14 Superconducting-magnetic-thermoelectric properties of thin film and characterization methods Students have to explain the characterization methods of superconducting-magnetic-thermoelectric properties of thin film.
Class 15 Review Students review thin-film growth processes, micro-patterning technologies, and analysis methods.

Textbook(s)

None required.

Reference books, course materials, etc.

All materials used in class can be found on OCW-i in advance.
Reference books: Donald L. Smith ed. Thin-Film Deposition: Principles and Practice

Assessment criteria and methods

Exercise problems (50%) will be given in the class every time and Reporting assignment (50%) will be give after the final class.

Related courses

  • None

Prerequisites (i.e., required knowledge, skills, courses, etc.)

No prerequisites.

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