[Summary of Lecture] This course focuses on the chemical process using plasma technology. The basic knowledge and characteristics of plasma, plasma generation methods and applications of plasma technology to the chemical processes are lectured. [Aim of Lecture] This lecture aims for students to understand the basic knowledge of the plasma chemistry and plasma processing and to acquire the ability to design and optimize the chemical processes using plasma technology.
[Target] Target of this course is to understand and obtain the basic knowledge and characteristics of thermal & non-thermal plasma, thermal & non-thermal plasma generation methods and applications of plasma technology to the chemical processes and to acquire the ability to design and optimize the chemical processes using plasma technology.
plasma, gas discharge, etching, chemical vapor deposition, sputtering, surface modification
|✔ Specialist skills||Intercultural skills||Communication skills||✔ Critical thinking skills||Practical and/or problem-solving skills|
At the beginning of each class, solutions to exercise problems that were assigned during the previous class are reviewed. Then the main points of the day’s lecture are given as exercise. At the end of class, students are asked to solve the exercise.
|Course schedule||Required learning|
|Class 1||Basics of plasma||To explain basics of plasma|
|Class 2||Types of Gas Discharges||To explain types of gas discharges|
|Class 3||Townsend Mechanism of Electrical Breakdown||To explain Townsend mechanism of electrical breakdown|
|Class 4||Streamer Mechanism of Electrical Breakdown||To explain streamer mechanism of electrical breakdown|
|Class 5||Gas Phase Reactions in Plasma||To explain characteristics of plasma chemical reactions and calculate their reaction rates|
|Class 6||Plasma Sheath and Surface Reactions in Plasma||To explain plasma sheath and surface reactions in plasma|
|Class 7||Non-Thermal Plasma Processing (I)||To explain non-thermal plasma processing|
|Class 8||Non-Thermal Plasma Processing (II)||To explain non-thermal plasma processing|
Materials provided in the class will be used.
Assessment is based on the exercise and final exam
mori.s.aa[at]m.titech.ac.jp : Shinsuke Mori
Make a reservation by e-mail in advance.