1) The course introduces fabrication technology of MEMS(Micro Electro Mechanical Systems) from the viewpoints of mechanical machining, lithography process and nano-technology.
2) Micromachines and micromechanisms are reviewed how they are applied to sensors, bio and chemical assay instruments and measurement systems.
3) The purpose of the course is laid on understanding of present bio-MEMS and cultivation of grounding for the future research and development of devices.
At the end of the course, students will be expected to:
1) Understand technical terms in the interdisciplinary technical fields such as mechanical, electrical, life and material engneering.
2) Acquire the advanced knowledge to discuss with specialists in related technical fields.
MEMS, NEMS, Precise machining, lithgraphy, nanotechnology, sensors, assay instruments, measurement systems
✔ Specialist skills | Intercultural skills | Communication skills | Critical thinking skills | Practical and/or problem-solving skills |
1) Students are requested to bring course materials, which is uploaded on the web site and printed by themselves.
2) Real materials are circulated in the class.
Course schedule | Required learning | |
---|---|---|
Class 1 | What is micromachine -fabrication, history and applications | Students shall understand historical background of micromachines. |
Class 2 | Lithography I - material, circuit design and processes | Students shall understand lithography process, particularly pre-process. |
Class 3 | Lithography II -deposition, etching, assembling and inspection | Students shall understand lithography process, particularly post-process. |
Class 4 | Inspection and Observation - microscopes and instruments | Students shall understand inspection instruments used in the fabrication process. |
Class 5 | Nanomechanism fabrication by biotechnology -fabrication technology and applications | Students shall understand nano mechanism fabrication process using biotechnology. |
Class 6 | μTAS and DNA chips -applications and fabrication technology | Students shall understand μTAS and DNA chips. |
Class 7 | Bio assay by MEMS -applications | Students shall understand application of MEMS to bio assay. |
None required.
Materials are uploaded on the website.
A report on the specific topic will be assigned at the end of the lecture.
No prerequisites.
An appointment is required by e-mail.