Thin-film growth and micro-patterning process of functional ceramics are important technologies, which have realized high-performance electronic devices, such as smart phone and tablet terminal, and environment devices, such as power generation (storage) devices and LEDs. In this lecture, students study film-growth and device-fabrication technologies, as well as characterization methods of ceramic thin films. In the first half, the lecture focuses on basic of thin-film growth techniques, and in the last half, it focuses on micro-patterning technologies and characterization methods, in connection with actual devices.
Students will acquire the following skills by taking this course.
1) Learn the basic science of thin-film growth.
2) Acquire skills of film formation.
3) Learn device fabrication process.
4) Learn characterization techniques for thin films.
5) Understand application of thin-film technologies in the engineering field.
Ceramics thin film, thin-film growth, Physical vapor deposition, Chemical vapor deposition, Micro-patterning, Scanning probe microscope, Structure analysis, Chemical composition analysis, Surface analysis, Electronic state analysis, Electronic property, Optical property, Dielectric property, Thermoelectric property, Magnetic property, Superconducting property
✔ Specialist skills | Intercultural skills | Communication skills | ✔ Critical thinking skills | ✔ Practical and/or problem-solving skills |
Exercise problems will be given.
Course schedule | Required learning | |
---|---|---|
Class 1 | Introduction of thin-film technology | Students have to understand the importance of thin-film-growth technique, micro-patterning technology, and film-property characterization. |
Class 2 | Basic of thin-film growth | Students have to explain the thin-film form and crystal growth modes. |
Class 3 | Epitaxial growth, Hetero-junction, Superlattice | Students have to explain the epitaxial film growth, and fabrication method of hetero-junction and superlattice, on single crystalline substrate. |
Class 4 | Physical vapor deposition | Students have to explain the vacuum deposition and molecular beam epitaxy method. |
Class 5 | Physical vapor deposition (II) | Students have to explain the Sputtering and Laser ablation method. |
Class 6 | Chemical vapor deposition | Students have to explain the Chemical vapor deposition method. |
Class 7 | Special thin-film growth techniques | Students have to explain the solid-phase epitaxy, liquid-phase epitaxy, and solution process for thin-film growth. |
Class 8 | Thin-film micro-patterning technologies | Students have to explain patterning process by lithography and micro-patterning technologies by etching process |
Class 9 | Structural analysis | Students have to explain the crystal structure analysis of thin film by X-ray diffraction and electron microscope. |
Class 10 | Surface analysis | Students have to explain the surface analysis of thin film by scanning probe microscope. |
Class 11 | Chemical composition and electronic state analysis | Students have to explain the chemical analysis and electronic state characterization of thin film. |
Class 12 | Review | Students review thin-film growth processes, micro-patterning technologies, and analysis methods. |
Class 13 | Electronic properties of thin film and characterization methods | Students have to explain the characterization methods of electronic properties of thin film. |
Class 14 | Optical-dielectric properties of thin film and characterization methods | Students have to explain the characterization methods of optical-dielectric properties of thin film. |
Class 15 | Superconducting-magnetic-thermoelectric properties of thin film and characterization methods | Students have to explain the characterization methods of superconducting-magnetic-thermoelectric properties of thin film. |
None required.
All materials used in class can be found on OCW-i in advance.
Reference books: Donald L. Smith ed. Thin-Film Deposition: Principles and Practice
Exercise problems (50%) will be given in the class every time and Reporting assignment (50%) will be give after the final class.
No prerequisites.