2016 Advanced Course of Ceramic Thin Film Technology

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Academic unit or major
Graduate major in Materials Science and Engineering
Instructor(s)
Shinozaki Kazuo  Wakiya Naoki  Sakamoto Naonori 
Course component(s)
Lecture
Day/Period(Room No.)
Mon3-4(S7-201)  Thr3-4(S7-201)  
Group
-
Course number
MAT.C403
Credits
2
Academic year
2016
Offered quarter
2Q
Syllabus updated
2016/12/14
Lecture notes updated
2016/8/1
Language used
Japanese
Access Index

Lecture

Lecture 1 Course outline. Introduction of thin film technologies (I) : definition of thin film, history of thin film science, various application of thin films.

2016.6.13(Mon.) 3-4Session

Lecture

Lecture 2 Introduction of thin film technologies (II) : thin film growth technologies, PVD, CVD, CSD, thin film growth through solid state crystallization.

2016.6.16(Thu.) 3-4Session

Lecture

Lecture 3 Basics of thin film growth (I) : mass transport in vapor phase, decomposition of raw material

2016.6.20(Mon.) 3-4Session

Lecture

Lecture 4 Basics of thin film growth (II) : reaction of raw material, adsorption of molecule on surface, behavior of molecular and atom on surface

2016.6.23(Thu.) 3-4Session

Lecture

Lecture 5 Basics of thin film growth (III) : surface reconstruction of substrate, physical and chemical adsorption, reaction at surface

2016.6.27(Mon.) 3-4Session

Lecture

Lecture 6 Basics of thin film growth (IV) : structure of thin film, crystal structure of thin film, growth conditions and their crystalline state, epitaxial film growth

2016.6.30(Thu.) 3-4Session

Lecture

Lecture 7 Oxide thin film growth by PVD method and their application

2016.7.4(Mon.) 3-4Session

Lecture

Lecture 8 Oxide thin film growth by CVD method and their application

2016.7.7(Thu.) 3-4Session

Lecture

Lecture 9 Application of thin film : thin film coating for engineering field application

2016.7.11(Mon.) 3-4Session

Lecture

Lecture 10 Characterization technology (I) : Fundamentals of X-ray diffraction method and its application for characterization of thin film structure

2016.7.14(Thu.) 3-4Session

Lecture

Lecture 11 Characterization technology (III) : molecular vibration and calculation of lattice vibration

2016.7.18(Mon.) 3-4Session

Lecture

Lecture 12 Characterization technology (I) : Fundamentals of transmission electron microscopy and its application for characterization of thin film structure

2016.7.21(Thu.) 3-4Session

Lecture

Lecture 13 Characterization technology (IV) : measurement of lattice vibration in thin film

2016.7.25(Mon.) 3-4Session

Lecture

Lecture 14 Characterization technology (V) : basics of scanning probe microscope and its application to thin film

2016.7.28(Thu.) 3-4Session

Lecture

Lecture 15 Characterization technology (VI) : electrical properties of thin film and measurement methods

2016.8.1(Mon.) 3-4Session

End of Term Examination

Lecture 16 final exam

2016.8.4(Thu.) 3-4Session

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