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- > Advanced Course of Ceramic Thin Film Technology
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School of Engineering
- Undergraduate major in Mechanical Engineering
- Undergraduate major in Systems and Control Engineering
- Undergraduate major in Electrical and Electronic Engineering
- Undergraduate major in Information and Communications Engineering
- Undergraduate major in Industrial Engineering and Economics
- Common courses
- School of Materials and Chemical Technology
- School of Computing
- School of Life Science and Technology
- School of Environment and Society
- 工学院，物質理工学院，環境・社会理工学院共通科目
- Liberal arts and basic science courses
- First-Year Courses
- School of Science
- School of Engineering
- School of Materials and Chemical Technology
- School of Computing
- School of Life Science and Technology
-
School of Environment and Society
- Department of Architecture and Building Engineering
- Department of Civil and Environmental Engineering
- Department of Transdisciplinary Science and Engineering
- Department of Social and Human Sciences
- Department of Innovation Science
- Graduate major in Technology and Innovation Management
- Common courses
- Liberal arts and basic science courses
- Academic unit or major
- Graduate major in Materials Science and Engineering
- Instructor(s)
- Shinozaki Kazuo Wakiya Naoki Sakamoto Naonori
- Class Format
- Lecture
- Media-enhanced courses
- Day/Period(Room No.)
- Mon3-4(S7-201) Thr3-4(S7-201)
- Group
- -
- Course number
- MAT.C403
- Credits
- 2
- Academic year
- 2016
- Offered quarter
- 2Q
- Syllabus updated
- 2016/12/14
- Lecture notes updated
- 2016/8/1
- Language used
- Japanese
- Access Index
-
Lecture
Lecture 1 Course outline. Introduction of thin film technologies (I) : definition of thin film, history of thin film science, various application of thin films.
2016.6.13(Mon.) 3-4Session
講義予定(54KB)
Lecture
Lecture 2 Introduction of thin film technologies (II) : thin film growth technologies, PVD, CVD, CSD, thin film growth through solid state crystallization.
2016.6.16(Thu.) 3-4Session
Lecture
Lecture 3 Basics of thin film growth (I) : mass transport in vapor phase, decomposition of raw material
2016.6.20(Mon.) 3-4Session
Lecture
Lecture 4 Basics of thin film growth (II) : reaction of raw material, adsorption of molecule on surface, behavior of molecular and atom on surface
2016.6.23(Thu.) 3-4Session
Lecture
Lecture 5 Basics of thin film growth (III) : surface reconstruction of substrate, physical and chemical adsorption, reaction at surface
2016.6.27(Mon.) 3-4Session
Lecture
Lecture 6 Basics of thin film growth (IV) : structure of thin film, crystal structure of thin film, growth conditions and their crystalline state, epitaxial film growth
2016.6.30(Thu.) 3-4Session
Lecture
Lecture 7 Oxide thin film growth by PVD method and their application
2016.7.4(Mon.) 3-4Session
Lecture
Lecture 8 Oxide thin film growth by CVD method and their application
2016.7.7(Thu.) 3-4Session
Lecture
Lecture 9 Application of thin film : thin film coating for engineering field application
2016.7.11(Mon.) 3-4Session
Lecture
Lecture 10 Characterization technology (I) : Fundamentals of X-ray diffraction method and its application for characterization of thin film structure
2016.7.14(Thu.) 3-4Session
Lecture
Lecture 11 Characterization technology (III) : molecular vibration and calculation of lattice vibration
2016.7.18(Mon.) 3-4Session
Lecture
Lecture 12 Characterization technology (I) : Fundamentals of transmission electron microscopy and its application for characterization of thin film structure
2016.7.21(Thu.) 3-4Session
Lecture
Lecture 13 Characterization technology (IV) : measurement of lattice vibration in thin film
2016.7.25(Mon.) 3-4Session
Lecture
Lecture 14 Characterization technology (V) : basics of scanning probe microscope and its application to thin film
2016.7.28(Thu.) 3-4Session
Lecture
Lecture 15 Characterization technology (VI) : electrical properties of thin film and measurement methods
2016.8.1(Mon.) 3-4Session
End of Term Examination
Lecture 16 final exam
2016.8.4(Thu.) 3-4Session
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