2019 Practical SEM observation techniques 1

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Academic unit or major
Graduate major in Materials Science and Engineering
Muraishi Shinji  Nakamura Yoshio 
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Course description and aims

Students will learn the fundamental techniques of SEM imaging and evaluation methods via operation of SEM.

Student learning outcomes

The goal of this class is to achieve several important observation and evaluation techniques through SEM operatoin by yourself.


scanning electron microscopy, SEM, secondary electron image, back scattering electoron image, wave dispersive X-ray spectroscopy, energy dispersive X-ray analysis

Competencies that will be developed

Specialist skills Intercultural skills Communication skills Critical thinking skills Practical and/or problem-solving skills

Class flow

Student will conduct SEM operation under the instruction of teaching staffs.
(instructor: Masaru Tada, Ookayama Materials Anaslysis Devision, Technical Department)

Course schedule/Required learning

  Course schedule Required learning
Class 1 Theory and practical operation To understand the principals for SEM imaging, e.g. magnification, focus, astigmatism, brightness, contrust, etc. Instruction will be give by teaching staff.
Class 2 Geometrical effects on secondary electron imaging To understand irradiation and emittion of electrons, oblique angle of sample surface and its contrast, emittion of secondary electrons from different surface morphology, relation of SEM image and position of detector, charge-up and conductivity of sample surface Instruction will be give by teaching staff.
Class 3 Effect of acceleration voltage and irradiation current To understand working distance and focus level, effect of acceleration voltage and irradiation current on secondary electron image, damage of sample surface during observation Instruction will be give by teaching staff.
Class 4 Back scattering electron imaging To understand SEI (secondary electron image) and BEI(back scattering electron imaging, or, composition image) and several imaging techniques associated with composition and topology of sample surface, sample inclination, channeling contrast, etc. Instruction will be give by teaching staff.
Class 5 WDS analysis I To understand principals of characteristic X-ray and spectroscopy (EDS, WDS) BEI and WDS analysis Sample height and WDS spectrum Quantitative analysis Instruction will be give by teaching staff.
Class 6 EDS analysis I To understand EDS spectrum, Peak identification, Spot analysis, Signal and Noise ratio of EDS and WDS Instruction will be give by teaching staff.
Class 7 EDS analysis II To understand EDS mapping of surface with certain roughness Instruction will be give by teaching staff.
Class 8 Problem study Review of assignment General discussion Instruction will be give by teaching staff.



Reference books, course materials, etc.

Handout will be given by instructor.

Assessment criteria and methods

Achievement will be evaluated by the quality of assignments (100%)

Related courses

  • MAT.M313 : Introduction to solid materials
  • MAT.M204 : Introduction to Metallurgy
  • MAT.M305 : Ferrous Materials I - Fundamentals of Iron and Steels
  • MAT.M306 : Ferrous Materials II - Principles for Applications
  • MAT.M307 : Science and Engineering of Non-ferrous Materials
  • MAT.M207 : Phase Diagram and Stability in Metals
  • ZUF.M319 : Phase Stability and Transformations in Metals
  • MAT.M411 : Phase Transformation and Microstructure Control
  • MAT.M412 : Reliability and Durability of Metals and Alloys

Prerequisites (i.e., required knowledge, skills, courses, etc.)

Fundamental knowledge of material science is recommended.
Due to the reason of practical operation of SEM, number of students is quite limited.
Application imformation will be provided in advance of evely quarter, pls find the announce represented at S8-build.

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