Students will learn the fundamental techniques of SEM imaging and evaluation methods via operation of SEM.
The goal of this class is to achieve several important observation and evaluation techniques through SEM operatoin by yourself.
scanning electron microscopy, SEM, secondary electron image, back scattering electoron image, wave dispersive X-ray spectroscopy, energy dispersive X-ray analysis
|✔ Specialist skills||Intercultural skills||Communication skills||✔ Critical thinking skills||✔ Practical and/or problem-solving skills|
Student will conduct SEM operation under the instruction of teaching staffs.
|Course schedule||Required learning|
|Class 1||Theory and practical operation To understand the principals for SEM imaging, e.g. magnification, focus, astigmatism, brightness, contrust, etc.||Instruction will be give by teaching staff.|
|Class 2||Geometrical effects on secondary electron imaging To understand irradiation and emittion of electrons, oblique angle of sample surface and its contrast, emittion of secondary electrons from different surface morphology, relation of SEM image and position of detector, charge-up and conductivity of sample surface||Instruction will be give by teaching staff.|
|Class 3||Effect of acceleration voltage and irradiation current To understand working distance and focus level, effect of acceleration voltage and irradiation current on secondary electron image, damage of sample surface during observation||Instruction will be give by teaching staff.|
|Class 4||Back scattering electron imaging To understand SEI (secondary electron image) and BEI(back scattering electron imaging, or, composition image) and several imaging techniques associated with composition and topology of sample surface, sample inclination, channeling contrast, etc.||Instruction will be give by teaching staff.|
|Class 5||WDS analysis I To understand principals of characteristic X-ray and spectroscopy (EDS, WDS) BEI and WDS analysis Sample height and WDS spectrum Quantitative analysis||Instruction will be give by teaching staff.|
|Class 6||EDS analysis I To understand EDS spectrum, Peak identification, Spot analysis, Signal and Noise ratio of EDS and WDS||Instruction will be give by teaching staff.|
|Class 7||EDS analysis II To understand EDS mapping of surface with certain roughness||Instruction will be give by teaching staff.|
|Class 8||Problem study Review of assignment General discussion||Instruction will be give by teaching staff.|
e.g., "SHIN SOUSAGATA DENSHI KENBIKYO"（NIHON KENBIKYO GAKKAI）
Handout will be given by instructor.
Achievement will be evaluated by the quality of assignments (100%)
Fundamental knowledge of material science is recommended.