2020 VLSI Technology I

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Academic unit or major
Graduate major in Electrical and Electronic Engineering
Wakabayashi Hitoshi  Kakushima Kuniyuki 
Class Format
Lecture    (ZOOM)
Media-enhanced courses
Day/Period(Room No.)
Mon1-2(G221)  Thr1-2(G221)  
Course number
Academic year
Offered quarter
Syllabus updated
Lecture notes updated
Language used
Access Index

Course description and aims

It is very important to understand the large-scale integrated circuit (VLSI) technology to support the modern society in the underlying. So in conjunction with VLSI Technology Second, the CMOS integrated circuit will be dicussed, in particular, scaling techniques, miniaturization technology (exposure technique, film forming technique, an etching technique, ion-implantation, CMP techniques, etc.), a memory device technology, sensor technology, actuator technology, interconnect technology, passive device technology, packaging technology, and others.

Student learning outcomes

By course of this lecture, the goals is to understand the large-scale integrated circuits that support modern society. In addition, we aim to be able to apply to the actual integrated circuit design.

Course taught by instructors with work experience

Applicable How instructors' work experience benefits the course
In a half of this lecture, a teaching faculty member with 20 years of practical experiences used to be belonging to multiple companies in the field of device technologies for the VLSI Technology will provide valuable contents on basics and applications in the VLSI Technology, based on his practical experiences.


Large-scale integrated circuit (VLSI) technology, CMOS integrated circuit, scaling technology, miniaturization technology, exposure technology, film formation technology, etching technology, CMP technology, memory device technology, sensor technology, actuator technology, wiring technology, passive device technology, packaging technology, and others

Competencies that will be developed

Specialist skills Intercultural skills Communication skills Critical thinking skills Practical and/or problem-solving skills

Class flow

Lecture through Zoom

Course schedule/Required learning

  Course schedule Required learning
Class 1 CMOS integrated circuits and an inverter The understanding about MOSFET, CMOS, inverter etc
Class 2 Logic circuits The understanding about logic circuits
Class 3 Memory device technology (SRAM, DRAM) The understanding about memory devices such as latch circuits, SRAM, DRAM
Class 4 Memory device technology (Flash and others) Flash memory and others, such as PCM, RRAM, MRAM, STT-MRAM, FeRAM etc
Class 5 Sensor device technology (and actuator device technology) The understanding about sensor (and actuator device) technologies
Class 6 Amplification circuit (and a differential amplifier) The understanding about amplification circuits (and a differential amplifier, etc)
Class 7 Low-power circuits The understanding about low-power consumption circuits, etc
Class 8 Overview of production technologies (wafer technology and clean technology) Overview of process technologies, especially wafer technology and clean technology
Class 9 Film deposition technology and etching technology The understanding about film deposition technology, etching technology etc
Class 10 Scaling technologies (Lithography technology) The understanding about the scaling technology and lithography technology
Class 11 Ion implantation technology Wet technology and CMP technology, and others The understanding about ion implantation technology The understanding about wet cleaning and chemical-mechanical polishing technology
Class 12 Interconnect technology, passive-device technology, and packaging technology The understanding about interconnect, passive device and assembling technologies, etc
Class 13 Layout technology, test, yield and reliability The understanding about layout technology, test yield and reliability
Class 14 Group presentations on advanced LSIs Group presentations on advanced LSIs

Out-of-Class Study Time (Preparation and Review)

To enhance effective learning, students are encouraged to spend approximately 100 minutes preparing for class and another 100 minutes reviewing class content afterwards (including assignments) for each class.
They should do so by referring to textbooks and other course material.


/Fundamentals of Modern VLSI Devices, 2nd Edition, Yuan Taur and Tak H. Ning, Cambridge University Press
/Semiconductor Manufactureing Technology, Michael Quirk and Julian Serda, Prentice Hall
/Nanoelectronics and Information Technology, Rainer Waser, Wilery-VCH

Reference books, course materials, etc.

Find uploaded data on the OCW/OCW-i by yourself.

Assessment criteria and methods

No Examination. However, submit the report after lectures.

Related courses

  • EEE.C341 : Integrated Circuit Technology Integrated Circuit Technology
  • ICT.I303 : Integrated Circuit Design
  • ZUS.L201 : Basic Integrated Circuits

Prerequisites (i.e., required knowledge, skills, courses, etc.)


Contact information (e-mail and phone)    Notice : Please replace from "[at]" to "@"(half-width character).

Hitoshi Wakabayashi (wakabayashi.h.ab[at]m.titech.ac.jp)
Kuniyuki Kakushima (kakushima.k.aa[at]m.titech.ac.jp)



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