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- School of Science
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School of Engineering
- Undergraduate major in Mechanical Engineering
- Undergraduate major in Systems and Control Engineering
- Undergraduate major in Electrical and Electronic Engineering
- Undergraduate major in Information and Communications Engineering
- Undergraduate major in Industrial Engineering and Economics
- Common courses
- School of Materials and Chemical Technology
- School of Computing
- School of Life Science and Technology
- School of Environment and Society
- 工学院，物質理工学院，環境・社会理工学院共通科目
- Liberal arts and basic science courses
- First-Year Courses
- School of Science
- School of Engineering
- School of Materials and Chemical Technology
- School of Computing
- School of Life Science and Technology
-
School of Environment and Society
- Department of Architecture and Building Engineering
- Department of Civil and Environmental Engineering
- Department of Transdisciplinary Science and Engineering
- Department of Social and Human Sciences
- Department of Innovation Science
- Graduate major in Technology and Innovation Management
- Common courses
- Liberal arts and basic science courses
- Academic unit or major
- Graduate major in Human Centered Science and Biomedical Engineering
- Instructor(s)
- Hatsuzawa Takeshi
- Class Format
- Lecture
- Media-enhanced courses
- Day/Period(Room No.)
- Tue3-4(B221,W833)
- Group
- -
- Course number
- HCB.M562
- Credits
- 1
- Academic year
- 2017
- Offered quarter
- 2Q
- Syllabus updated
- 2017/4/24
- Lecture notes updated
- -
- Language used
- Japanese
- Access Index
-
Course description and aims
1) The course introduces fabrication technology of MEMS(Micro Electro Mechanical Systems) from the viewpoints of mechanical machining, lithography process and nano-technology.
2) Micromachines and micromechanisms are reviewed how they are applied to sensors, bio and chemical assay instruments and measurement systems.
3) The purpose of the course is laid on understanding of present bio-MEMS and cultivation of grounding for the future research and development of devices.
Student learning outcomes
At the end of the course, students will be expected to:
1) Understand technical terms in the interdisciplinary technical fields such as mechanicaｌ, electrical, life and material engneering.
2) Acquire the advanced knowledge to discuss with specialists in related technical fields.
Keywords
MEMS, NEMS, Precise machining, lithgraphy, nanotechnology, sensors, assay instruments, measurement systems
Competencies that will be developed
| ✔ Specialist skills | Intercultural skills | Communication skills | Critical thinking skills | Practical and/or problem-solving skills |
Class flow
1) Students are requested to bring course materials, which is uploaded on the web site and printed by themselves.
2) Real materials are circulated in the class.
Course schedule/Required learning
| Course schedule | Required learning | |
|---|---|---|
| Class 1 | What is micromachine -fabrication, history and applications | Students shall understand historical background of micromachines. |
| Class 2 | Lithography I - material, circuit design and processes | Students shall understand lithography process, particularly pre-process. |
| Class 3 | Lithography II -deposition, etching, assembling and inspection | Students shall understand lithography process, particularly post-process. |
| Class 4 | Inspection and Observation - microscopes and instruments | Students shall understand inspection instruments used in the fabrication process. |
| Class 5 | Nanomechanism fabrication by biotechnology -fabrication technology and applications | Students shall understand nano mechanism fabrication process using biotechnology. |
| Class 6 | μTAS and DNA chips -applications and fabrication technology | Students shall understand μTAS and DNA chips. |
| Class 7 | Bio assay by MEMS -applications | Students shall understand application of MEMS to bio assay. |
Textbook(s)
None required.
Reference books, course materials, etc.
Materials are uploaded on the website.
Assessment criteria and methods
A report on the specific topic will be assigned at the end of the lecture.
Related courses
- MEC.J331 ： Fundamentals of Micro and Nano Machining
- MEC.J332 ： Fundamentals of Precision Measurement
- MEC.J531 ： Micro and Nano Systems
- MEC.J532 ： Advanced Course of Micro and Nano Machining
Prerequisites (i.e., required knowledge, skills, courses, etc.)
No prerequisites.
Office hours
An appointment is required by e-mail.
