This lecture focuses in understanding fundamentals, data processing, and practical method, like stylus method, scanning probe microscopes, LASER metrology, and motion accuracy in ultra precision form metrology.
By the end of this course, students will be able to:
1) understand the principle and items of ultra precision metrology.
2) understand the practical method in ultra precision form metrology,
3) understand the basic technology of ultra precision metrology.
4) understand the bases to create ultra precision metrology.
Ultra precision form measurement, information processing, ultra precision stylus measurement technique, scanning probe measurement, LASER measurement
|Intercultural skills||Communication skills||Specialist skills||Critical thinking skills||Practical and/or problem-solving skills|
Lecture on specific topic each time
|Course schedule||Required learning|
|Class 1||Ultra Precise Measurement and Metrology Standards||What's the precise and ultra precise measurements|
|Class 2||Ultra-precision stylus profilometer and scanning probe microscope||Limitation in physical contact|
|Class 3||Information processing for ultra-precision measurement||Measure and error|
|Class 4||Coordinate measuring system||Analysis and algorithm in size and form evaluation|
|Class 5||Ultra precision laser measurement||LASER optics|
|Class 6||Motion accuracy measurement||What's the motion accuracy|
|Class 7||Measurement accuracy and statistical test - For biometric data -||Measurement accuracy and statistical test|
１）J.M.Rueger;Electronic Distance Measurement, Springer-Verlag(1990)
２）J.S.Bendat and A.G.Piersol;Analysis and Measurement Procedures, John Wiley & Sons,Inc.(1971)
４）M.J.Bx, D.Davies and W.H.Swann;Mathematical and Statistical Techniques,Imperial Chemical IndustriesLtd.
Multiple report submission 100% (Attendance is required for scoring the report tasks)
It is desirable that students have learned “measurement” in mechanical engineering previously.