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School of Engineering
- Undergraduate major in Mechanical Engineering
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- 工学院，物質理工学院，環境・社会理工学院共通科目
- Liberal arts and basic science courses
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- School of Science
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School of Environment and Society
- Department of Architecture and Building Engineering
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- Graduate major in Technology and Innovation Management
- Common courses
- Liberal arts and basic science courses
- Academic unit or major
- Graduate major in Mechanical Engineering
- Class Format
- Lecture
- Media-enhanced courses
- Day/Period(Room No.)
- Tue1-2(W833,G111)
- Group
- -
- Course number
- MEC.J431
- Credits
- 1
- Academic year
- 2017
- Offered quarter
- 3Q
- Syllabus updated
- 2017/4/26
- Lecture notes updated
- 2017/11/6
- Language used
- Japanese
- Access Index
-
Course description and aims
This lecture focuses in understanding fundamentals, data processing, and practical method, like stylus method, scanning probe microscopes, LASER metrology, and motion accuracy in ultra precision form metrology.
Student learning outcomes
By the end of this course, students will be able to:
1) understand the principle and items of ultra precision metrology.
2) understand the practical method in ultra precision form metrology,
3) understand the basic technology of ultra precision metrology.
4) understand the bases to create ultra precision metrology.
Keywords
Ultra precision form measurement, information processing, ultra precision stylus measurement technique, scanning probe measurement, LASER measurement
Competencies that will be developed
| ✔ Specialist skills | Intercultural skills | Communication skills | Critical thinking skills | Practical and/or problem-solving skills |
Class flow
Lecture topics individually
Course schedule/Required learning
| Course schedule | Required learning | |
|---|---|---|
| Class 1 | Fundamentals of ultra precision metrology | What's the precise and ultra precise measurements |
| Class 2 | Fundamentals of information processing in ultra precision metrology | Measure and error |
| Class 3 | Stylus-based measurement systems | Limitation in physical contact |
| Class 4 | Optical measurement systems | LASER optics |
| Class 5 | Scanning probe microscope | Measuring principle and scanning method |
| Class 6 | Three dimensional coordinate measuring system(CMM) | Analysis and algorithm in size and form evaluation |
| Class 7 | Motion accuracy measurement method | What's the motion accuracy |
| Class 8 | Technologies in ultra precision metrology | Detection technology and environmental technology |
Textbook(s)
none
Reference books, course materials, etc.
１）J.M.Rueger;Electronic Distance Measurement, Springer-Verlag(1990)
２）J.S.Bendat and A.G.Piersol;Analysis and Measurement Procedures, John Wiley & Sons,Inc.(1971)
３）.Feder;Fractals,Plenum Press,N.Y.(1988)
４）M.J.Bx, D.Davies and W.H.Swann;Mathematical and Statistical Techniques,Imperial Chemical IndustriesLtd.
Assessment criteria and methods
evaluate by final report and small tests at every lecture
Related courses
- MEC.J432 ： Mechanism and Control for Ultra-precision Motion
Prerequisites (i.e., required knowledge, skills, courses, etc.)
It is desirable that students have learned “measurement” in mechanical engineering previously.
