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School of Engineering
- Undergraduate major in Mechanical Engineering
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- 工学院，物質理工学院，環境・社会理工学院共通科目
- Liberal arts and basic science courses
- First-Year Courses
- School of Science
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School of Environment and Society
- Department of Architecture and Building Engineering
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- Graduate major in Technology and Innovation Management
- Common courses
- Liberal arts and basic science courses
- Academic unit or major
- Graduate major in Mechanical Engineering
- Instructor(s)
- Hatsuzawa Takeshi Ohtake Naoto Yoshida Kazuhiro Yanagida Yasuko Kim Joon-Wan Yamamoto Takatoki
- Class Format
- Lecture
- Media-enhanced courses
- Day/Period(Room No.)
- Fri3-4(S622)
- Group
- -
- Course number
- MEC.J531
- Credits
- 2
- Academic year
- 2016
- Offered quarter
- 1-2Q
- Syllabus updated
- 2016/12/14
- Lecture notes updated
- -
- Language used
- Japanese
- Access Index
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Course description and aims
This is a course to learn fundamentals of MEMS/NEMS to realize a tiny, high-precision, high-performance machine system by utilizing various micro/nano machining technologies based on the photolithography cultivated in the semiconductor integrated circuit manufacturing. Based on MEMS / NEMS design methods to take into account the size effects and scaling laws, photolithography, deposition, etching, and precision mechanical machining will be lectured. This course also describes micro actuators, micro sensors, micro fluidic devices, nano devices, and bio-MEMS to utilize these micro/nano machining technologies.
Student learning outcomes
Students will acquire the following knowledge by taking this course.
1) Learn everything from basic to advanced technology of mechanisms, design techniques, film formation, and microfabrication for creating micro and nano-systems.
2) Get a picture of trends in advanced research of this field, related to microactuators, microsensors, microfluid devices, and bio MEMS that apply that technology.
Topics
MEMS/NEMS devices, thin film technology, lithography, etching, microfabrication, microactuators, microsensors, micro and nano-fluidics, bio MEMS
Keywords
MEMS, NEMS, Micromachine, Nanomachine, Photolithography, Deposition, Wet&Dry etching, Actuator, Sensor
Competencies that will be developed
| ✔ Specialist skills | Intercultural skills | Communication skills | Critical thinking skills | Practical and/or problem-solving skills |
Class flow
Students learn a different topic each week.
Course schedule/Required learning
| Course schedule | Required learning | |
|---|---|---|
| Class 1 | Introduction | To understand the overview and the aim of the lecture. |
| Class 2 | Fundamentals of MEMS/NEMS | To learn fundamentals of MEMS/NEMS. |
| Class 3 | Fundamentals of thin-film technology | To figure out fundamentals of thin-film technology. |
| Class 4 | Physical vapor deposition and chemical vapor deposition | To learn vapor deposition technologies. |
| Class 5 | Photolithography | To gain an understanding of various types of photoresists and the exposure process. |
| Class 6 | Wet etching | To learn what is wet etching process. |
| Class 7 | Dry etching | To learn what is dry etching process. |
| Class 8 | Precision mechanical machining | To investigate precision mechanical machining technologies. |
| Class 9 | Micro actuator | To grasp the trend in micro actuators. |
| Class 10 | Micro sensor | To understand the trend in micro sensors. |
| Class 11 | Micro fluidic device | To grasp trend in micro fluidic devices. |
| Class 12 | Nano fluidic device | To understand the trend in ｎano fluidic devices. |
| Class 13 | Bio-MEMS | To understand the trend in bio-MEMS. |
| Class 14 | Bio-nano device | To understand the trend in bio-nano devices. |
| Class 15 | Review | To get the understanding the overview of fabrication technologies and applications in MEMS/NEMS. |
Textbook(s)
None
Reference books, course materials, etc.
1)MEMS and Microsystems: Design and Manufacture, Tai-Ran Hsu, McGraw-Hill
2)Solid-State Physics, Fluidics, and Analytical Techniques in Micro- and Nanotechnology (Fundmentals of Microfabrication and Nanotechnology), Marc J. Madou,CRC Press
3)Manufacturing Techniques for Microfabrication and Nanotechnology (Fundamentals of Microfabrication and Nanotechnolgy), Marc J. Madou, CRC Press
4) From MEMS to Bio-MEMS and Bio-NEMS:Marc J. Madou, CRC PressMicrofabrication and Nanotechnology)
5) Nanosystems, K Drexler, Wiley. Int.
Assessment criteria and methods
Homeworks and reports
Related courses
- MEC.J331 ： Fundamentals of Micro and Nano Machining
Prerequisites (i.e., required knowledge, skills, courses, etc.)
None
