2021 Ultra-precision Measurement

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Academic unit or major
Graduate major in Mechanical Engineering
Yoshioka Hayato  Hatsuzawa Takeshi  Hara Seiichiro 
Course component(s)
Lecture    (ZOOM)
Day/Period(Room No.)
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Course description and aims

This lecture focuses in understanding fundamentals, data processing, and practical method, like stylus method, scanning probe microscopes, LASER metrology, and motion accuracy in ultra precision form metrology.

Student learning outcomes

By the end of this course, students will be able to:
1) understand the principle and items of ultra precision metrology.
2) understand the practical method in ultra precision form metrology,
3) understand the basic technology of ultra precision metrology.
4) understand the bases to create ultra precision metrology.

Course taught by instructors with work experience

Applicable How instructors' work experience benefits the course
One of the lecturer has 12 years of experience working with the National Research Laboratory of Metrology of the MITI for developing national standards of nanometer length, precision measurement and calibration technology, with practical experience in ultra-precision measurement. The practices and research contents will be reflected in the lecture.


Ultra precision form measurement, information processing, ultra precision stylus measurement technique, scanning probe measurement, LASER measurement

Competencies that will be developed

Specialist skills Intercultural skills Communication skills Critical thinking skills Practical and/or problem-solving skills

Class flow

Lecture on specific topic each time

Course schedule/Required learning

  Course schedule Required learning
Class 1 Ultra Precise Measurement and Metrology Standards What's the precise and ultra precise measurements
Class 2 Ultra-precision stylus profilometer and scanning probe microscope Limitation in physical contact
Class 3 Information processing for ultra-precision measurement Knowledge for measurement information processing
Class 4 Coordinate measuring system Analysis and algorithm in size and form evaluation
Class 5 Ultra precision laser measurement(1) LASER optics
Class 6 Ultra precision laser measurement(2) Error factors
Class 7 Motion accuracy measurement What's the motion accuracy

Out-of-Class Study Time (Preparation and Review)

To enhance effective learning, students are encouraged to spend approximately 100 minutes preparing for class and another 100 minutes reviewing class content afterwards (including assignments) for each class.
They should do so by referring to textbooks and other course material.



Reference books, course materials, etc.

1)J.M.Rueger;Electronic Distance Measurement, Springer-Verlag(1990) 
2)J.S.Bendat and A.G.Piersol;Analysis and Measurement Procedures, John Wiley & Sons,Inc.(1971)
3)J.Feder;Fractals,Plenum Press,N.Y.(1988)
4)M.J.Bx, D.Davies and W.H.Swann;Mathematical and Statistical Techniques,Imperial Chemical IndustriesLtd.

Assessment criteria and methods

Multiple report submission 100% (Attendance is required for scoring the report tasks)

Related courses

  • MEC.J432 : Mechanism and Control for Ultra-precision Motion

Prerequisites (i.e., required knowledge, skills, courses, etc.)

It is desirable that students have learned “measurement” in mechanical engineering previously.

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