This lecture focuses in understanding fundamentals, data processing, and practical method, like stylus method, scanning probe microscopes, LASER metrology, and motion accuracy in ultra precision form metrology.
By the end of this course, students will be able to:
1) understand the principle and items of ultra precision metrology.
2) understand the practical method in ultra precision form metrology,
3) understand the basic technology of ultra precision metrology.
4) understand the bases to create ultra precision metrology.
Ultra precision form measurement, information processing, ultra precision stylus measurement technique, scanning probe measurement, LASER measurement
✔ Specialist skills | Intercultural skills | Communication skills | Critical thinking skills | Practical and/or problem-solving skills |
Lecture on specific topic each time
Course schedule | Required learning | |
---|---|---|
Class 1 | Fundamentals of ultra precision metrology | What's the precise and ultra precise measurements |
Class 2 | Fundamentals of information processing in ultra precision metrology | Measure and error |
Class 3 | Stylus-based measurement systems | Limitation in physical contact |
Class 4 | Optical measurement systems | LASER optics |
Class 5 | Scanning probe microscope | Measuring principle and scanning method |
Class 6 | Three dimensional coordinate measuring system(CMM) | Analysis and algorithm in size and form evaluation |
Class 7 | Motion accuracy measurement method | What's the motion accuracy |
Class 8 | Measurement accuracy and statistical test - For biometric data - | Measurement accuracy and statistical test |
none
1)J.M.Rueger;Electronic Distance Measurement, Springer-Verlag(1990)
2)J.S.Bendat and A.G.Piersol;Analysis and Measurement Procedures, John Wiley & Sons,Inc.(1971)
3).Feder;Fractals,Plenum Press,N.Y.(1988)
4)M.J.Bx, D.Davies and W.H.Swann;Mathematical and Statistical Techniques,Imperial Chemical IndustriesLtd.
Multiple report submission and attendance attitude of each lecture
It is desirable that students have learned “measurement” in mechanical engineering previously.