2017 Mechanism and Control for Ultra-precision Motion

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Academic unit or major
Graduate major in Mechanical Engineering
Shinshi Tadahiko 
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Course description and aims

Students in this course learn about the basic components of machinery for which precision motion is important, such as ultraprecision machine tools, exposure devices, 3D measuring machines, etc., the type and properties of components selected for the basic configuration, design techniques, as well as precision measuring technology and control methods that are needed for motion systems that use that machinery. The instructor also introduced trends in their use.
High-precision movement is a basic and important capability which can be implemented by understanding real machine problems in greater detail and solving them. The purpose of this course is to acquire basic knowledge and skills for this task.

Student learning outcomes

Students will acquire the following skills by taking this course.
1) Learn basic knowledge of machines for precision and ultra-precision motions, and gain an understanding of precision deterioration factors.
2) Gain an understanding of basic principles of sensors and properties of control methods for precision and ultra-precision motions, and be able to choose appropriately.


Motion error, precision mechanism, ultra-precision mechanism, mechanism design, guide, bearing, power transmission, actuator, measurement, sensor, control, ultra-precision machine tool, exposure tool, coordinate measuring machine

Competencies that will be developed

Specialist skills Intercultural skills Communication skills Critical thinking skills Practical and/or problem-solving skills

Class flow

Opportunities to voluntarily participate in discussion will be provided in each class, and participation and understanding will be checked. At the end of the class, students will work on exercise problems related to the lectured contents.

Course schedule/Required learning

  Course schedule Required learning
Class 1 Introduction Understand features of precision/ultra-precision motion systems, basic technical terms and fundamental principle for the systems
Class 2 Design of precision/ultra-precision mechanisms with a short working range Explain the suitable components and their combination for the mechanisms with a short working range and their features.
Class 3 Design of precision/ultra-precision mechanisms with a long working range Explain the suitable components and their combination for the mechanisms with a long working range and their features.
Class 4 Measurement techniques for precision/ultra-precision motion systems Understand the kinds, the principle and the features of sensors for the motion systems
Class 5 Control techniques for precision/ultra-precision motion systems Understand the kinds and the features of control methods for the motion systems
Class 6 Case study <1> Exposure tools  - Aim and transition of performance and configuration Understand the role of exposure devices and be able to explain reasons for changes in performance and structure.
Class 7 Case study <2> Coordinate measuring machine - Aim and features Understand the role of 3-dimensional measuring equipment, and be able to explain structural features.
Class 8 Trend of technology and research regarding precision / ultra-precision motion systems, summery of this course Understand key points in this course and explain the features of the trend in this research field


Not specified.

Reference books, course materials, etc.

A. H. Slocum, Precision Machine Design, Society of Manufacturing, ISBN-13: 978-0872634923
David A. Dornfeld, Precision Manufacturing, Springer, ISBN-13: 978-0387324678
V. C. Venkatesh et al, Precision Engineering, McGraw-Hill Professional, ISBN-13: 978-0071548274
T. Yamaguchi et al, Nanoscale Servo Control, TDU Press, ISBN-13: 978-4501113506 (Japanese)
A. Matsubara,Design and Control of Precision Positioning and Feed Drive Systems, Morikita Publishing, ISBN-13: 978-4627919815 (Japanese)
J. Otsuka,Nanotechnology and Ultra-precision Positioning Technology,Kogyo Chosakai Publishing,ISBN-13: 978-4769321750 (Japanese)
R. Suzuki et al, Instrument Engineering, Shoko-do, ISBN-13: 978-4785690656 (Japanese)

Assessment criteria and methods

Exercises or short test,and activities in class (40%),
Term paper (60%)

Related courses

  • MEC.J311 : Fundamentals of Precision Machinery
  • MEC.I312 : Modeling and Control Theory
  • MEC.J431 : Ultra-precision Measurement

Prerequisites (i.e., required knowledge, skills, courses, etc.)

No prerequisites are necessary, but enrollment in the related courses is desirable.

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