2016 Ultra-precision Measurement

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Academic unit or major
Graduate major in Mechanical Engineering
Sasajima Kazuyuki  Hatsuzawa Takeshi  Yoshioka Hayato  Hara Seiichiro  Yoshida Takako 
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Course description and aims

This lecture focuses in understanding fundamentals, data processing, and practical method, like stylus method, scanning probe microscopes, LASER metrology, and motion accuracy in ultra precision form metrology.

Student learning outcomes

By the end of this course, students will be able to:
1) understand the principle and items of ultra precision metrology.
2) understand the practical method in ultra precision form metrology,
3) understand the basic technology of ultra precision metrology.
4) understand the bases to create ultra precision metrology.


Ultra precision form measurement, information processing, ultra precision stylus measurement technique, scanning probe measurement, LASER measurement

Competencies that will be developed

Specialist skills Intercultural skills Communication skills Critical thinking skills Practical and/or problem-solving skills

Class flow

Lecture topics individually

Course schedule/Required learning

  Course schedule Required learning
Class 1 Fundamentals of ultra precision metrology What's the precise and ultra precise measurements
Class 2 Fundamentals of information processing in ultra precision metrology Measure and error
Class 3 Stylus-based measurement systems Limitation in physical contact
Class 4 Optical measurement systems LASER optics
Class 5 Scanning probe microscope Measuring principle and scanning method
Class 6 Three dimensional coordinate measuring system(CMM) Analysis and algorithm in size and form evaluation
Class 7 Motion accuracy measurement method What's the motion accuracy
Class 8 Technologies in ultra precision metrology Detection technology and environmental technology



Reference books, course materials, etc.

1)J.M.Rueger;Electronic Distance Measurement, Springer-Verlag(1990) 
2)J.S.Bendat and A.G.Piersol;Analysis and Measurement Procedures, John Wiley & Sons,Inc.(1971)
3).Feder;Fractals,Plenum Press,N.Y.(1988)
4)M.J.Bx, D.Davies and W.H.Swann;Mathematical and Statistical Techniques,Imperial Chemical IndustriesLtd.

Assessment criteria and methods

evaluate by final report and small tests at every lecture

Related courses

  • MEC.J432 : Mechanism and Control for Ultra-precision Motion

Prerequisites (i.e., required knowledge, skills, courses, etc.)

It is desirable that students have learned “measurement” in mechanical engineering previously.

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