This lecture focuses in understanding fundamentals, data processing, and practical method, like stylus method, scanning probe microscopes, LASER metrology, and motion accuracy in ultra precision form metrology.
By the end of this course, students will be able to:
1) understand the principle and items of ultra precision metrology.
2) understand the practical method in ultra precision form metrology,
3) understand the basic technology of ultra precision metrology.
4) understand the bases to create ultra precision metrology.
Ultra precision form measurement, information processing, ultra precision stylus measurement technique, scanning probe measurement, LASER measurement
|Intercultural skills||Communication skills||Specialist skills||Critical thinking skills||Practical and/or problem-solving skills|
Lecture topics individually
|Course schedule||Required learning|
|Class 1||Fundamentals of ultra precision metrology||What's the precise and ultra precise measurements|
|Class 2||Fundamentals of information processing in ultra precision metrology||Measure and error|
|Class 3||Stylus-based measurement systems||Limitation in physical contact|
|Class 4||Optical measurement systems||LASER optics|
|Class 5||Scanning probe microscope||Measuring principle and scanning method|
|Class 6||Three dimensional coordinate measuring system(CMM)||Analysis and algorithm in size and form evaluation|
|Class 7||Motion accuracy measurement method||What's the motion accuracy|
|Class 8||Technologies in ultra precision metrology||Detection technology and environmental technology|
１）J.M.Rueger;Electronic Distance Measurement, Springer-Verlag(1990)
２）J.S.Bendat and A.G.Piersol;Analysis and Measurement Procedures, John Wiley & Sons,Inc.(1971)
４）M.J.Bx, D.Davies and W.H.Swann;Mathematical and Statistical Techniques,Imperial Chemical IndustriesLtd.
evaluate by final report and small tests at every lecture
It is desirable that students have learned “measurement” in mechanical engineering previously.