2019 Fundamentals of Micro and Nano Machining

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Academic unit or major
Undergraduate major in Mechanical Engineering
Instructor(s)
Kim Joon-Wan  Shinshi Tadahiko  Yamamoto Takatoki  Nisisako Takasi  Hatsuzawa Takeshi 
Course component(s)
Lecture
Day/Period(Room No.)
Mon1-2(I321)  
Group
-
Course number
MEC.J331
Credits
1
Academic year
2019
Offered quarter
1Q
Syllabus updated
2019/4/8
Lecture notes updated
-
Language used
Japanese
Access Index

Course description and aims

This course covers applications and various microfabrication methods to design and fabricate MEMS/NEMS devices. Methods include, patterning based on photolithography, deposition, etching (wet & dry), nanofabrication technologies, next-generation fabrication technologies, and the physics behind them. Enrollment preference is given to any students.

Student learning outcomes

By the end of this course, students will be able to:
1) Acquire the baseline knowledge about the theory and methods of various microfabrication techniques based on photolithography, and the ability to apply for developing the MEMS/NEMS devices.
2) Design the basic level of MEMS/NEMS devices.

Keywords

MEMS, NEMS, Micromachine, Nanomachine, Photolithography, Deposition, Wet&Dry etching, Nanofabrication, Next-generation fabrication technology

Competencies that will be developed

Intercultural skills Communication skills Specialist skills Critical thinking skills Practical and/or problem-solving skills
- - - -

Class flow

Each theme every week.

Course schedule/Required learning

  Course schedule Required learning
Class 1 Overview of MEMS/NEMS Study what are MEMS?, and the applications.
Class 2 Patterning Understand the patterning method base on photolithography.
Class 3 DepositionStudy various deposition methods. Understand the various deposition methods.
Class 4 Wet etching Understand what the wet etching is.
Class 5 Dry etching Understand what the dry etching is.
Class 6 Nano-fabrication Study nanofabrication methods.
Class 7 Integration of various micro and nano fabrication processes Learn the technology that integrates various micro and nano fabrication processes.
Class 8 Next-generation fabrication technology, Summary, and Final exam. 1. Study Next-generation micro/nano fabrication methods. 2. Get a better understanding the overview of microfabrication technologies to fabricate MEMS/NEMS devices, by turning around the previous lectures. 3. Check the level of understanding of the class.

Textbook(s)

None

Reference books, course materials, etc.

Japanese book only.

Assessment criteria and methods

By final test(about 70%) and assignments (about 30%)

Related courses

  • MEC.G311 : Introduction to Manufacturing Engineering
  • MEC.G331 : Production System Engineering

Prerequisites (i.e., required knowledge, skills, courses, etc.)

None

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