2018 Fundamentals of Micro and Nano Machining

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Academic unit or major
Undergraduate major in Mechanical Engineering
Hatsuzawa Takeshi  Shinshi Tadahiko  Yamamoto Takatoki  Kim Joon-Wan  Nisisako Takasi 
Class Format
Media-enhanced courses
Day/Period(Room No.)
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Syllabus updated
Lecture notes updated
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Course description and aims

This course covers applications and various microfabrication methods to design and fabricate MEMS/NEMS devices. Methods include, patterning based on photolithography, deposition, etching (wet & dry), nanofabrication technologies, next-generation fabrication technologies, and the physics behind them. Enrollment preference is given to any students.

Student learning outcomes

By the end of this course, students will be able to:
1) Acquire the baseline knowledge about the theory and methods of various microfabrication techniques based on photolithography, and the ability to apply for developing the MEMS/NEMS devices.
2) Design the basic level of MEMS/NEMS devices.


MEMS, NEMS, Micromachine, Nanomachine, Photolithography, Deposition, Wet&Dry etching, Nanofabrication, Next-generation fabrication technology

Competencies that will be developed

Specialist skills Intercultural skills Communication skills Critical thinking skills Practical and/or problem-solving skills

Class flow

Each theme every week.

Course schedule/Required learning

  Course schedule Required learning
Class 1 Overview of MEMS/NEMS Study what are MEMS?, and the applications.
Class 2 Patterning Understand the patterning method base on photolithography.
Class 3 DepositionStudy various deposition methods. Understand the various deposition methods.
Class 4 Wet etching Understand what the wet etching is.
Class 5 Dry etching Understand what the dry etching is.
Class 6 Nano-fabrication Study nanofabrication methods.
Class 7 Next-generation fabrication technology Study Next-generation micro/nano fabrication methods.
Class 8 Summary Get a better understanding the overview of microfabrication technologies to fabricate MEMS/NEMS devices, by turning around the previous lectures.



Reference books, course materials, etc.

Japanese book only.

Assessment criteria and methods

By final test(about 70%) and assignments (about 30%)

Related courses

  • MEC.G311 : Introduction to Manufacturing Engineering
  • MEC.G331 : Production System Engineering

Prerequisites (i.e., required knowledge, skills, courses, etc.)


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