This lecture focuses in understanding fundamentals, data processing, and practical method, like stylus method, scanning probe microscopes, LASER metrology, and motion accuracy in ultra precision form metrology.
By the end of this course, students will be able to:
1) understand the principle and items of ultra precision metrology.
2) understand the practical method in ultra precision form metrology,
3) understand the basic technology of ultra precision metrology.
4) understand the bases to create ultra precision metrology.
|✔ Applicable||How instructors' work experience benefits the course|
|One of the lecturer has 12 years of experience working with the National Research Laboratory of Metrology of the MITI for developing national standards of nanometer length, precision measurement and calibration technology, with practical experience in ultra-precision measurement. The practices and research contents will be reflected in the lecture.|
Ultra precision form measurement, information processing, ultra precision stylus measurement technique, scanning probe measurement, LASER measurement
|✔ Specialist skills||Intercultural skills||Communication skills||Critical thinking skills||Practical and/or problem-solving skills|
Lecture on specific topic each time
|Course schedule||Required learning|
|Class 1||Ultra Precise Measurement and Metrology Standards||What's the precise and ultra precise measurements|
|Class 2||Ultra-precision stylus profilometer and scanning probe microscope||Limitation in physical contact|
|Class 3||Information processing for ultra-precision measurement||Knowledge for measurement information processing|
|Class 4||Coordinate measuring system||Analysis and algorithm in size and form evaluation|
|Class 5||Ultra precision laser measurement(1)||LASER optics|
|Class 6||Ultra precision laser measurement(2)||Error factors|
|Class 7||Motion accuracy measurement||What's the motion accuracy|
To enhance effective learning, students are encouraged to spend approximately 100 minutes preparing for class and another 100 minutes reviewing class content afterwards (including assignments) for each class.
They should do so by referring to textbooks and other course material.
１）J.M.Rueger;Electronic Distance Measurement, Springer-Verlag(1990)
２）J.S.Bendat and A.G.Piersol;Analysis and Measurement Procedures, John Wiley & Sons,Inc.(1971)
４）M.J.Bx, D.Davies and W.H.Swann;Mathematical and Statistical Techniques,Imperial Chemical IndustriesLtd.
Multiple report submission 100% (Attendance is required for scoring the report tasks)
It is desirable that students have learned “measurement” in mechanical engineering previously.