2020 Plasma Engineering

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Academic unit or major
Graduate major in Electrical and Electronic Engineering
Akatsuka Hiroshi  Okino Akitoshi 
Course component(s)
Mode of instruction
Day/Period(Room No.)
Tue3-4(H111)  Fri3-4(H111)  
Course number
Academic year
Offered quarter
Syllabus updated
Lecture notes updated
Language used
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Course description and aims

Plasma is electrically neutral ionized gas consisting of electrons and ions. Plasma plays an important role in modern engineering. Theory and concepts dealing with the plasma are fairly common in the electrical and electronic engineering.
In this course, students will learn from the basics of plasma physics, plasma generation, measurement, to industrial applications of plasma.
It includes excitation and ionization, motion of charged particles in electromagnetic fields, plasma as particles, plasma as fluid, collision and transportation, confinement of plasma, wave in the plasma, and plasma measurement.

Student learning outcomes

[Goal] The concept and discussion of plasma physics have become one of the fundamentals in all aspects of science and engineering. In particular, electrical and electronic engineers and researchers must learn plasma physics as well as electromagnetism. The goal is to understand fundamentals and applications of plasmas from the viewpoints of engineering, starting from movement of charged particles in electromagnetic field, characteristics as a group of charged particles, and ionization phenomena.

Course taught by instructors with work experience

Applicable How instructors' work experience benefits the course
In this lecture, an instructor who has practical experience in the development and commercialization of plasma devices will use the practical experience to provide education on the generation and application of plasma.


Plasma, discharge, ionization, excitation, Bltzmann equation, drift motion, magnetic moment, dispersion relation, sheath, thermonuclear fusion

Competencies that will be developed

Specialist skills Intercultural skills Communication skills Critical thinking skills Practical and/or problem-solving skills

Class flow

Each lecture uses PowerPoint or the blackboard. Free software uploaded to the internet will be used as necessary, and simple calculation problems will be suggested. Please read carefully the learning goals for each class and review sufficiently. To confirm your understanding a small test may be carried out, so please bring a scientific calculator.

Course schedule/Required learning

  Course schedule Required learning
Class 1 Introduction. What is plasma? Students shall understand contents of this lecture.
Class 2 Basic processes in gas Students shall understand basic processes in gas such as particle collision.
Class 3 Generation of plasma Students shall understand generation process of discharge plasma.
Class 4 Mass properties of plasma Students shall understand mass properties of plasma such as plasma oscillation.
Class 5 Atomic/molecular process in plasma Students shall understand atomic/molecular process in plasma such as collision, excitation, ionization, emission.
Class 6 Physical phenomena in weakly ionized plasma Students shall understand physical phenomena in weakly ionized plasma.
Class 7 Applications and measurements of plasma, and confirmation of understanding of first half lecture. Students shall understand latest plasma applications and measurements. A confirmation test is performed for the first half.
Class 8 Kinetic theory of gases, derivation of the Boltzmann equation, and derivation of fluid equation of plasmas, Debye length Students shall understand the derivation of Boltzmann equation for describing the electron energy distribution function, and the fluid equation as the moment equation.
Class 9 Plasma oscillation, Particle movement in plasmas, conservation of the magnetic moment, drift motion, electrical conductivity, generalized Ohm's law Students shall understand the motion of plasma as charged particles, magnetic moment, various drift motions, and the electrical conductivity.
Class 10 Waves in plasmas - dispersion relation, two-fluid plasma equation, and electrostatic wave, electromagnetic waves Students shall understand various electromagnetic waves and electrostatic waves in plasma and how to derive equations describing them to understand the dispersion relation. In addition, they shall understand the necessity in which case we must describe the motion of ions separately, and the characteristics of electrostatic wave as longitudinal wave.
Class 11 Diffusion, dynamic equilibrium and stability of plasmas Students shall also understand the basics of diffusion, dynamic equilibrium and stability of plasmas.
Class 12 Boundary conditions of plasmas - sheath and presheath, probe measurement, potential formation of lab-scale plasmas, plasma etching and deposition Students shall understand the structure of sheath, as the boundary of the plasma and the substances in plasma. They shall also understand the probe measurement as its application. They shall also be able to explain plasma etching and deposition for plasma electronics.
Class 13 Numerical simulation of plasmas Students shall understand the two plasma simulation techniques; the fluid method and the particle method. And they shall perform case study of each application.
Class 14 Contemporary R&D topics of thermonuclear fusion plasmas Students shall understand a variety of plasma fusion methods and the current status of the R & D issues.

Out-of-Class Study Time (Preparation and Review)

To enhance effective learning, students are encouraged to spend approximately 100 minutes preparing for class and another 100 minutes reviewing class content afterwards (including assignments) for each class.
They should do so by referring to textbooks and other course material.


Nothing special

Reference books, course materials, etc.

Ken Yukimura "Discharge plasma engineering", Ohm-sha
Masanori Akasaki "Fundamentals of plasma engineering", Sabgyo-tosho
Yasuyoshi Yasaka "Discharge plasma engineering", Morikita-shuppan
Ryouichi Hanaoka "High voltage engineering", Morikita-shuppan

Assessment criteria and methods

Exercises in each lecture (70%), confirmation of understandings with term report submission (30%).

Related courses

  • EEE.P331 : High Voltage Engineering
  • EEE.P461 : Pulsed Power Technology
  • NCL.A402 : Nuclear Fusion Reactor Engineering
  • EEE.D592 : Advanced Topics on Material Analysis and Basics of Plasma Processing for Nano Devices

Prerequisites (i.e., required knowledge, skills, courses, etc.)

Electromagnetic theory and applied mathematics of undergraduate level

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