波動マイクロシステム   Micro-Acoustic Systems

文字サイズ 

担当教員
黒澤 実  中村 健太郎 
使用教室
木1-2(G224)  
単位数
講義:2  演習:0  実験:0
講義コード
88111
シラバス更新日
2012年9月21日
講義資料更新日
2012年9月21日
学期
後期

講義概要

弾性体の振動・波動を応用した微小なアクチュエータやセンサなどのマイクロシステムに関して,動作原理やそこで用いられる材料,加工・製作技術,モデル化の手法などを修得する。具体的なセンサやアクチュエータを取り上げ,その原理からモデル化を行い理解を深める。

Micro actuators and sensors based on elastic vibration and/or elastic wave are lectured. Starting from materials and fabrication technologies for MEMS (micro electro mechanical systems) devices, structures and principles of the transducers are introduced. A couple of sensors and actuators are studied in detail to obtain clear understanding for actual devices. For this purpose, modeling methods of the piezoelectric electro mechanical system and opto mechatro system are discussed.

講義の目的

Based on the application of elastic wave and acoustic wave engineering, micro electro mechanical systems (MEMS) are lectured from the principle to modeling. MEMS is getting more and more important technology field in these days. The priceple, analysis method and modeling of electro-acoustic transducers which are very important in this field, are lectured. Opto-acoustical sensing system is lectured also.

講義計画

01.Elastic wave and vibration
02.Piezoelectric equations and electro mechanical equivalent circuit
03.Simple vibration mode electo mechanical transducers
04.Vibro gyro scope: principle and modeling
05.Principle of ultrasonic motors
06.Modeling of ultrasonic motors
07.Actuators and sensors using piezoelectirc film material
08.Surface acoustic wave device: principle and modeling
09.Surface acoustic wave motor
10.Opto-acoust sensing
11.Fiber optic micro sensors

教科書・参考書等

Original materials will be deriverd.

関連科目・履修の条件等

Ultrasonic electronics is helpful for well understanding. 

成績評価

Final examination and short problems in each lecture.

担当教員の一言

Starting from the basics of elastic vibration/wave phenomenon and piezoelectric transducers, electro mechanical equivalent circuit modeling is lectured. This modeling is effective to understand the quantitative relationshipt of the device operation.

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