- Lecturer
- Kurosawa Minoru Nakamura Kentaro
- Place
- Thr1-2(G224)
- Credits
- Lecture2 Exercise0 Experiment0
- Code
- 88111
- Syllabus updated
- 2011/9/20
- Lecture notes updated
- 2011/9/20
- Semester
- Fall Semester
Outline of lecture
蠑ｾ諤ｧ菴薙ｮ謖ｯ蜍輔ｻ豕｢蜍輔ｒ蠢懃畑縺励◆蠕ｮ蟆上↑繧｢繧ｯ繝√Η繧ｨ繝ｼ繧ｿ繧繧ｻ繝ｳ繧ｵ縺ｪ縺ｩ縺ｮ繝槭う繧ｯ繝ｭ繧ｷ繧ｹ繝繝縺ｫ髢｢縺励※ｼ悟虚菴懷次逅繧縺昴％縺ｧ逕ｨ縺繧峨ｌ繧区攝譁呻ｼ悟刈蟾･繝ｻ陬ｽ菴懈橿陦難ｼ後Δ繝繝ｫ蛹悶ｮ謇区ｳ輔↑縺ｩ繧剃ｿｮ蠕励☆繧九ょｷ菴鍋噪縺ｪ繧ｻ繝ｳ繧ｵ繧繧｢繧ｯ繝√Η繧ｨ繝ｼ繧ｿ繧貞叙繧贋ｸ翫£ｼ後◎縺ｮ蜴溽炊縺九ｉ繝｢繝繝ｫ蛹悶ｒ陦後＞逅隗｣繧呈ｷｱ繧√ｋ縲
Micro actuators and sensors based on elastic vibration and/or elastic wave are lectured. Starting from materials and fabrication technologies for MEMS (micro electro mechanical systems) devices, structures and principles of the transducers are introduced. A couple of sensors and actuators are studied in detail to obtain clear understanding for actual devices. For this purpose, modeling methods of the piezoelectric electro mechanical system and opto mechatro system are discussed.
Purpose of lecture
Based on the application of elastic wave and acoustic wave engineering, micro electro mechanical systems (MEMS) are lectured from the principle to modeling. MEMS is getting more and more important technology field in these days. The priceple, analysis method and modeling of electro-acoustic transducers which are very important in this field, are lectured. Opto-acoustical sensing system is lectured also.
Plan of lecture
01.Elastic wave and vibration
02.Piezoelectric equations and electro mechanical equivalent circuit
03.Simple vibration mode electo mechanical transducers
04.Vibro gyro scope: principle and modeling
05.Principle of ultrasonic motors
06.Modeling of ultrasonic motors
07.Actuators and sensors using piezoelectirc film material
08.Surface acoustic wave device: principle and modeling
09.Surface acoustic wave motor
10.Opto-acoust sensing
11.Fiber optic micro sensors
Textbook and reference
Original materials will be deriverd.
Related and/or prerequisite courses
Ultrasonic electronics is helpful for well understanding.縲
Evaluation
Final examination and short problems in each lecture.
Comments from lecturer
Starting from the basics of elastic vibration/wave phenomenon and piezoelectric transducers, electro mechanical equivalent circuit modeling is lectured. This modeling is effective to understand the quantitative relationshipt of the device operation.
