- 使用教室
- 月3-4(原留 North No.2 5F-521)
- 単位数
- 講義：2 演習：0 実験：0
- 講義コード
- 71064
- シラバス更新日
- 2011年9月20日
- 講義資料更新日
- 2011年9月20日
- 学期
- 後期
講義の目的
This subject aims to introduce fundamental physics of plasmas and their applications.This lecture also covers experimental methods to generate plasmas, diagnostics, fundamental equations to describe weakly ionized plasmas, applications for material processing, and high density plasmas.
講義計画
1. Fundamentals of plasmas I (plasma frequency, Debye shielding, etc.)
2. Fundamentals of plasmas II (Maxwell's equation, mean free path, etc.)
3. Experimental methods to generate plasmas
4. Atomic and molecular processes in plasmas
5. Diagnostics of plasmas I - probes
6. Diagnostics of plasmas II - spectroscopic and optical methods
7. Fundamental equations to describe weakly ionized plasmas
8. Physical properties of weakly ionized plasmas
9. Applications of weakly ionized plasmas for material processing
10. Fundamentals of high density plasmas
11. Generations of high density plasmas
12. Applications of high density plasmas
教科書・参考書等
Textbook is prepared by the instructors.
関連科目・履修の条件等
Basic knowledge of atomic physics or physical chemistry of undergraduate level is necessary. That of electromagnetic theory is also mandatory.
成績評価
Report and record of attendance
