- Lecturer
- Milne William Ireland
- Place
- Intensive
- Credits
- Lecture1 Exercise0 Experiment0
- Code
- 55031
- Syllabus updated
- 2015/10/2
- Lecture notes updated
- 2015/10/2
- Access Index
-
- Semester
- Fall Semester
Lecture
Lecture 1 Introduction
2015.11.17(Tue.) 7-8session
Lecture
Lecture 2 Silicon based materials
2015.11.17(Tue.) 9-10session
Lecture
Lecture 3 Carbon based materials
2015.11.18(Wed.) 5-6session
Lecture
Lecture 4 Material selection
2015.11.18(Wed.) 7-8session
Lecture
Lecture 5 Patterning and wet etching
2015.11.18(Wed.) 9-10session
Lecture
Lecture 6 Other etching techniques, bonding
2015.11.20(Fri.) 1-2session
Lecture
Lecture 7 Process flow and yield
2015.11.20(Fri.) 3-4session
