- Lecturer
- Milne William Ireland
- Place
- Intensive
- Credits
- Lecture1 Exercise0 Experiment0
- Code
- 55031
- Syllabus updated
- 2015/10/2
- Lecture notes updated
- 2015/10/2
- Access Index
-
- Semester
- Fall Semester
Outline of lecture
Microsystems (otherwise known as MicroElectroMechanical Systems, MEMS) will be discussed in terms of materials and device fabrication processes.
Purpose of lecture
Microsystems (otherwise known as MicroElectroMechanical Systems, MEMS) are mechanical devices that are fabricated on a micrometre scale using techniques more commonly associated with the semiconductor industry for the fabrication of microelectronic devices. They can be classified as either passive devices (e.g. cantilevers, beams) or actuators (e.g. electrostatic drives, thermal expansion actuators) or sensors (e.g. gyroscopes, pressure sensors) and the worldwide market for these devices has expanded greatly in recent years. This course will introduce both the processing methods by which these devices are manufactured and the properties of the materials which are employed, including traditional silicon-based technology and new materials, such as diamond-like carbon, polymers and biological thin films. Case studies will be used with particular reference to one sensing and one actuating application to exemplify how materials and fabrication processes are integrated
Plan of lecture
Introduction (L1)
窶｢ Overview of Microsystems technology and introduction of principal case studies
Materials and Growth ( L2 and L3)
窶｢ Silicon-based materials including c-Si, Amorphous Si and poly Si and silicon alloys (L2)
窶｢ Carbon-based materials including Diamond, Diamond Like Carbon and CNTs, Metals, TCOs and polymers (L3)
Material Selection and Device Fabrication techniques (L4, 5, L6 and 7)
窶｢ Material selection L4
窶｢ Patterning and wet Etching L5
窶｢ Other etching techniques, Bonding, planarisation and biomicrosystems L6
窶｢ Process flow and Yield L7
Textbook and reference
Hand on prints
Related and/or prerequisite courses
Semiconductor devices
Evaluation
By reports
