Plasma technologies play an important role in various industrial applications. The objective of this lecture is to understand the fundamental physics and the engineering side of plasma. Excitation and ionization, behavior of charged particles in electromagnetic field, behavior of plasma as particles and fluid, collision and transportation of particles, plasma generation, measurement techniques, and industrial applications will be lectured.
The objective of this lecture is to understand the fundamental physics and the engineering side of plasma.
01. Introduction
02. Properties of gases
03. Behavior of charged particles (1)
04. Ionization, Excitation, Attachment, Drift (1)
05. Ionization, Excitation, Attachment, Drift (2)
06. Diffusion, Breakdown mechanism (1)
07. Dc, AC, and pulsed discharges
08. Electromgnetic field in plasma
09. Review
10. Diagnostics (1)
11. Diagnostics (2)
12. Numerical simulation
13. Plasma applications (1)
14. Plasma applications (2)
15. Plasma applications (3)
M.A. Lieberman and A.J. Lichtenberg, "Principles of Plasma Discharges and Materials Processing", John Wiley and Sons, Inc.
八田吉典,『気体放電』,近代科学社
赤崎正則,『プラズマ工学の基礎』,産業図書
八坂保能,『放電プラズマ工学』,森北出版
花岡良一,『高電圧工学』,森北出版
『放電ハンドブック』,電気学会
Fundamentals on the electromagnetics and electric circuit for undergraduate course students are required.
Evaluation will be based on reports and the final examination.