- 使用教室
- 木7-8(S514)
- 単位数
- 講義：2 演習：0 実験：0
- 講義コード
- 35036
- シラバス更新日
- 2014年12月2日
- 講義資料更新日
- 2014年9月18日
- 学期
- 後期
講義概要
Characteristics of thermal & non-thermal plasma, thermal & non-thermal plasma generation methods and applications of plasma technology are lectured to obtain the basic knowledge of the plasma chemistry and plasma processing. Plasma generation methods include thermal equilibrium plasma; arc plasma, RF plasma, microwave plasma, et al. and non-equilibrium plasma; glow plasma, microwave plasma, DBD plasma, and atmospheric pressure non-equilibrium plasma. Applications of plasma include application of high temperature heat source, organic and inorganic synthesis, decomposition technology of various materials, separation technology, et al. Also current topics in this field are given.
講義の目的
Characteristics of thermal & non-thermal plasma, thermal & non-thermal plasma generation methods and applications of plasma technology are lectured to obtain the basic knowledge of the plasma chemistry and plasma processing.
講義計画
1. Introduction -What is Plasma?-
2. Types of Gas Discharges and Glow Discharge
3. Townsend Mechanism of Electrical Breakdown
4. Streamer Mechanism of Electrical Breakdown
5. Debye Shielding and Plasma Sheath
6. Gas Phase Reactions in Plasmas
7. Surface Reactions in Plasmas
8. Non-thermal Plasma Processing (I)
9. Non-thermal Plasma Processing (II)
10. Basics of Thermal Plasmas
11. Thermal Equilibrium (I)
12. Thermal Equilibrium (II)
13. Quenching Temperature
14. Thermal Plasma Processing (I)
15. Topics of Recent Plasma Processing (II)
教科書・参考書等
Distributed properly
関連科目・履修の条件等
Open for any graduate students
成績評価
Exercise and Report
