Outline of lecture

Characteristics of thermal & non-thermal plasma, thermal & non-thermal plasma generation methods and applications of plasma technology are lectured to obtain the basic knowledge of the plasma chemistry and plasma processing. Plasma generation methods include thermal equilibrium plasma; arc plasma, RF plasma, microwave plasma, et al. and non-equilibrium plasma; glow plasma, microwave plasma, DBD plasma, and atmospheric pressure non-equilibrium plasma. Applications of plasma include application of high temperature heat source, organic and inorganic synthesis, decomposition technology of various materials, separation technology, et al. Also current topics in this field are given.

Purpose of lecture

Characteristics of thermal & non-thermal plasma, thermal & non-thermal plasma generation methods and applications of plasma technology are lectured to obtain the basic knowledge of the plasma chemistry and plasma processing.

Plan of lecture

1. Introduction -What is Plasma?-
2. Types of Gas Discharges and Glow Discharge
3. Townsend Mechanism of Electrical Breakdown
4. Streamer Mechanism of Electrical Breakdown
5. Debye Shielding and Plasma Sheath
6. Gas Phase Reactions in Plasmas
7. Surface Reactions in Plasmas
8. Non-thermal Plasma Processing (I)
9. Non-thermal Plasma Processing (II)
10. Basics of Thermal Plasmas
11. Thermal Equilibrium (I)
12. Thermal Equilibrium (II)
13. Quenching Temperature
14. Thermal Plasma Processing (I)
15. Topics of Recent Plasma Processing (II)

Textbook and reference

Distributed properly

Related and/or prerequisite courses

Open for any graduate students

Evaluation

Exercise and Report